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Proceedings Paper

A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing
Author(s): Ilya V. Uvarov; Victor V. Naumov; Olga M. Koroleva; Elena I. Vaganova; Ildar I. Amirov
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Paper Abstract

Electrostatically actuated MEMS switch with the resistive contact is presented. Design of the switch includes the active contact breaking mechanism, which allows to detach the beam from the signal electrode in case of sticking. The mechanism is realized by the presence of two driving electrodes under the beam. The switch is fabricated by the surface micromachining. Finite element simulation and experimental investigation of the switch in a cold regime are performed.

Paper Details

Date Published: 30 December 2016
PDF: 8 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241A (30 December 2016); doi: 10.1117/12.2266439
Show Author Affiliations
Ilya V. Uvarov, Institute of Physics and Technology (Russian Federation)
Victor V. Naumov, Institute of Physics and Technology (Russian Federation)
Olga M. Koroleva, Institute of Physics and Technology (Russian Federation)
Elena I. Vaganova, Institute of Physics and Technology (Russian Federation)
Ildar I. Amirov, Institute of Physics and Technology (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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