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Proceedings Paper

Development of biosensors for non-invasive measurements of heart failure biomarkers in saliva
Author(s): Albert Alcacer; Angelos Streklas; Abdoullatif Baraket; Nadia Zine; Abdelhamid Errachid; Joan Bausells
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Paper Abstract

Biomedical engineering research today is focused on non-invasive techniques for detection of biomarkers related to specific health issues 1. Three metal layer microelectrode (μE) sensors have been implemented to detect specific biomarkers which can be found in human saliva related with heart failure problems 2 such as interleukin and Tumore Necrosis Factor-α (TNF-α), and used as highly sensitive saliva sensors. We designed specialized μEs combining different technologies for multiple measurements aiming to a lab-on-a-chip future integration. Measurements are based to basic principles of Cyclic Voltammetry (CV) and Electrochemical Impedance Spectroscopy (EIS). Thus, certain planar technology was used involving three metal layers of gold, platinum and silver deposited over an oxidized silicon substrate following standard cleanroom procedures of lithography for the definition of μEs, sputtering physical vapor deposition (PVD) for gold, evaporation PVD for silver and platinum, and plasma enhanced chemical vapor deposition (PECVD) for passivation layer of silicon nitride.

Paper Details

Date Published: 13 June 2017
PDF: 7 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460H (13 June 2017); doi: 10.1117/12.2266363
Show Author Affiliations
Albert Alcacer, Instituto de Microelectrónica de Barcelona (Spain)
Angelos Streklas, Instituto de Microelectrónica de Barcelona (Spain)
Abdoullatif Baraket, Institut des Sciences Analytiques, Univ. Claude Bernard Lyon 1 (France)
Nadia Zine, Institut des Sciences Analytiques, Univ. Claude Bernard Lyon 1 (France)
Abdelhamid Errachid, Institut des Sciences Analytiques, Univ. Claude Bernard Lyon 1 (France)
Joan Bausells, Instituto de Microelectrónica de Barcelona (Spain)


Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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