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Proceedings Paper

Temperature simulation at ZnO surface processed by laser interference lithography
Author(s): L. Parellada-Monreal; M. Martinez-Calderón; I. Castro-Hurtado; A. Rodríguez; S. M. Olaizola; M. Gomez-Aranzadi; I. Ayerdi; E. Castaño; G. G. Mandayo
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Paper Abstract

ZnO thin film on alumina has been deposited by RF sputtering and processed by two dimensional direct laser interference patterning (DLIP) using a nanosecond laser (λ=355nm). The thermodynamic and structural properties have been investigated.

Morphological characterization has shown a line-pattern structure with small alterations depending on the fluence of the laser (85 mJ/cm2 or 165 mJ/cm2). In order to understand these modifications, a simulation has been carried out to model the transient temperature during the DLIP to study the temperature reached by the ZnO surface for the different fluences. Moreover, a comparison with a non-interference energy distribution pulse is also simulated to corroborate the model.

For samples processed by DLIP, a thermal annealing effect has been noticed when temperatures at the surface are between 1000K and 1800K. Due to the slow cooling process, a possible recrystallization of the material similar to a thermal treatment is obtained. For temperatures close or higher than 1800K, the material starts to ablate.

Paper Details

Date Published: 30 May 2017
PDF: 12 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102461G (30 May 2017); doi: 10.1117/12.2266260
Show Author Affiliations
L. Parellada-Monreal, Univ. de Navarra (Spain)
M. Martinez-Calderón, Univ. de Navarra (Spain)
I. Castro-Hurtado, Univ. de Navarra (Spain)
A. Rodríguez, Univ. de Navarra (Spain)
S. M. Olaizola, Univ. de Navarra (Spain)
M. Gomez-Aranzadi, Univ. de Navarra (Spain)
I. Ayerdi, Univ. de Navarra (Spain)
E. Castaño, Univ. de Navarra (Spain)
G. G. Mandayo, Univ. de Navarra (Spain)

Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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