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Proceedings Paper

XUV generation from the interaction of pico- and nanosecond laser pulses with nanostructured targets
Author(s): Ellie Floyd Barte; Ragava Lokasani; Jan Proska; Lucie Stolcova; Oisin Maguire; Domagoj Kos; Paul Sheridan; Fergal O’Reilly; Emma Sokell; Tom McCormack; Gerry O’Sullivan; Padraig Dunne; Jiri Limpouch
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Paper Abstract

Laser-produced plasmas are intense sources of XUV radiation that can be suitable for different applications such as extreme ultraviolet lithography, beyond extreme ultraviolet lithography and water window imaging. In particular, much work has focused on the use of tin plasmas for extreme ultraviolet lithography at 13.5 nm. We have investigated the spectral behavior of the laser produced plasmas formed on closely packed polystyrene microspheres and porous alumina targets covered by a thin tin layer in the spectral region from 2.5 to 16 nm. Nd:YAG lasers delivering pulses of 170 ps (Ekspla SL312P )and 7 ns (Continuum Surelite) duration were focused onto the nanostructured targets coated with tin. The intensity dependence of the recorded spectra was studied; the conversion efficiency (CE) of laser energy into the emission in the 13.5 nm spectral region was estimated. We have observed an increase in CE using high intensity 170 ps Nd:YAG laser pulses as compared with a 7 ns pulse.

Paper Details

Date Published: 17 May 2017
PDF: 6 pages
Proc. SPIE 10243, X-ray Lasers and Coherent X-ray Sources: Development and Applications, 1024315 (17 May 2017); doi: 10.1117/12.2265984
Show Author Affiliations
Ellie Floyd Barte, Czech Technical Univ. in Prague (Czech Republic)
Univ. College Dublin (Ireland)
Ragava Lokasani, Czech Technical Univ. in Prague (Czech Republic)
Univ. College Dublin (Ireland)
Jan Proska, Czech Technical Univ. in Prague (Czech Republic)
Lucie Stolcova, Czech Technical Univ. in Prague (Czech Republic)
Oisin Maguire, Univ. College Dublin (Ireland)
Domagoj Kos, Univ. College Dublin (Ireland)
Czech Technical Univ. in Prague (Czech Republic)
Paul Sheridan, Univ. College Dublin (Ireland)
Fergal O’Reilly, Univ. College Dublin (Ireland)
Emma Sokell, Univ. College Dublin (Ireland)
Tom McCormack, Univ. College Dublin (Ireland)
Gerry O’Sullivan, Univ. College Dublin (Ireland)
Padraig Dunne, Univ. College Dublin (Ireland)
Jiri Limpouch, Czech Technical Univ. in Prague (Czech Republic)


Published in SPIE Proceedings Vol. 10243:
X-ray Lasers and Coherent X-ray Sources: Development and Applications
Annie Klisnick; Carmen S. Menoni, Editor(s)

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