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Proceedings Paper

Optimization of microroughness of replicated x-ray optics
Author(s): Lenka Mikulickova; Ladislav Pina; Adolf Inneman; Daniela Doubravova; Veronika Marsikova; Ladislav Sieger; Martin Urban; Veronika Stehliková; Ondrej Nentvich; Jaromir Mirovsky
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Paper Abstract

We report on our work of minimizing the microroughness of replicated grazing incidence X-ray optics. Ion beam and RF sputter cleaning was used as surface treatment and we compare its effects in the article. Vacuum deposition of smoothing layers was also used for minimizing the microroughness. The surfaces were measured by atomic force microscopy and X-ray reflectometry. Microroughness less than 0,5 nm RMS and Ra was achieved.

Paper Details

Date Published: 31 May 2017
PDF: 9 pages
Proc. SPIE 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V, 102350A (31 May 2017); doi: 10.1117/12.2265810
Show Author Affiliations
Lenka Mikulickova, Institute of Chemical Technology in Prague (Czech Republic)
Thin Film Technological Service Ltd. (Czech Republic)
Ladislav Pina, Czech Technical Univ. in Prague (Czech Republic)
Rigaku Innovative Technologies Europe Ltd. (Czech Republic)
Adolf Inneman, Czech Technical Univ. in Prague (Czech Republic)
Rigaku Innovative Technologies Europe Ltd. (Czech Republic)
Daniela Doubravova, Rigaku Innovative Technologies Europe Ltd. (Czech Republic)
Veronika Marsikova, Czech Technical Univ. in Prague (Czech Republic)
Rigaku Innovative Technologies Europe Ltd. (Czech Republic)
Ladislav Sieger, Czech Technical Univ. in Prague (Czech Republic)
Martin Urban, Czech Technical Univ. in Prague (Czech Republic)
Veronika Stehliková, Czech Technical Univ. in Prague (Czech Republic)
Ondrej Nentvich, Czech Technical Univ. in Prague (Czech Republic)
Jaromir Mirovsky, Thin Film Technological Service Ltd. (Czech Republic)


Published in SPIE Proceedings Vol. 10235:
EUV and X-ray Optics: Synergy between Laboratory and Space V
René Hudec; Ladislav Pina, Editor(s)

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