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Proceedings Paper

Design review of a multiwavelength, three-dimensional scatterometer
Author(s): Fredrick M. Cady; John C. Stover; Donald R. Bjork; Marvin L. Bernt; Mary W. Knighton; Daniel J. Wilson; Daniel R. Cheever
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Paper Abstract

A design review of a five wavelength, laser-based, full reflection hemispherical BRDF instrument is given. A source box design which provides full polarization control of incident radiation is described. The receiver design uses a periscope mirror which allows near (< 1 .5°) retroreflection measurements with full received polarization control. Replacement of the periscope mirror with a beam splitter pellicle allows 0° retroreflection measurements. The goniometer design shown allows the measurement of full reflection hemisphere scatter with transmission measurements possible. A new software control approach which allows a user to define scans in scatter space without being concerned with mechanical axes motion is described.

Paper Details

Date Published: 1 December 1990
PDF: 8 pages
Proc. SPIE 1331, Stray Radiation in Optical Systems, (1 December 1990); doi: 10.1117/12.22658
Show Author Affiliations
Fredrick M. Cady, TMA Technologies, Inc. (United States)
John C. Stover, TMA Technologies, Inc. (United States)
Donald R. Bjork, TMA Technologies, Inc. (United States)
Marvin L. Bernt, TMA Technologies, Inc. (United States)
Mary W. Knighton, TMA Technologies, Inc. (United States)
Daniel J. Wilson, TMA Technologies, Inc. (United States)
Daniel R. Cheever, TMA Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 1331:
Stray Radiation in Optical Systems
Robert P. Breault, Editor(s)

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