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Proceedings Paper

Experimental study of laser trimmed surface acoustic wave delay line topologies
Author(s): Dmitry Lukyanov; Sergey Shevchenko; Alexander Kukaev; Daniil Safronov
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Paper Abstract

Laser ablation technique is promising for production of surface acoustic wave (SAW) sensors complicated topologies. Its main advantages in comparison to a photolithography method are: simplicity in pattern creation, no need in photomasks, possible to work with thick metallization (up to 20 μm), possibility to correct topology after the sensor sealing and others. This work discusses possible error sources, including side heating of metal films, and presents results of first characteristics evaluation for experimental delay lines produced by laser technology.

Paper Details

Date Published: 16 May 2017
PDF: 6 pages
Proc. SPIE 10231, Optical Sensors 2017, 102311T (16 May 2017); doi: 10.1117/12.2265675
Show Author Affiliations
Dmitry Lukyanov, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
Sergey Shevchenko, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
Alexander Kukaev, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
Daniil Safronov, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)

Published in SPIE Proceedings Vol. 10231:
Optical Sensors 2017
Francesco Baldini; Jiri Homola; Robert A. Lieberman, Editor(s)

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