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Proceedings Paper

Design review of a vacuum cryogenic scatterometer
Author(s): Tom Matovich; John C. Stover; Jeffrey Rifkin
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Paper Abstract

This paper reviews design goals for an infrared scatterometer being built to measure cryogenically cooled samples. The instrument, which will be installed in the Optical Characterization Facility at Oak Ridge National Laboratory, will be capable of operation at both 3.39 and 1 0.6 micrometers for both reflective and transmissive samples up to six inches in diameter. BSDF is measured through the specular beam and out to grazing scatter angles. The paper gives simulated instrument signatures obtained in TMA's measurement facility.

Paper Details

Date Published: 1 December 1990
PDF: 8 pages
Proc. SPIE 1331, Stray Radiation in Optical Systems, (1 December 1990); doi: 10.1117/12.22655
Show Author Affiliations
Tom Matovich, TMA Technologies, Inc. (United States)
John C. Stover, TMA Technologies, Inc. (United States)
Jeffrey Rifkin, TMA Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 1331:
Stray Radiation in Optical Systems
Robert P. Breault, Editor(s)

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