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Proceedings Paper

Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2
Author(s): Ondřej Chmela; Jakub Sadílek; Jordi Samà; Albert Romano-Rodriguez; Jaromír Hubálek; Stella Vallejos
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Paper Abstract

Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO3 nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250°C and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.

Paper Details

Date Published: 30 May 2017
PDF: 7 pages
Proc. SPIE 10248, Nanotechnology VIII, 102480F (30 May 2017); doi: 10.1117/12.2265000
Show Author Affiliations
Ondřej Chmela, Brno Univ. of Technology (Czech Republic)
Jakub Sadílek, Brno Univ. of Technology (Czech Republic)
Jordi Samà, Univ. de Barcelona (Spain)
Albert Romano-Rodriguez, Univ. de Barcelona (Spain)
Jaromír Hubálek, Brno Univ. of Technology (Czech Republic)
Stella Vallejos, Brno Univ. of Technology (Czech Republic)


Published in SPIE Proceedings Vol. 10248:
Nanotechnology VIII
Ion M. Tiginyanu, Editor(s)

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