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Proceedings Paper

Wax microfluidics light-addressable valve with multiple actuation
Author(s): M. Díaz-González; G. Boix; C. Fernández-Sánchez; A. Baldi
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Paper Abstract

This work reports on the design, fabrication and performance of a novel light-actuated wax microvalve. This valve is capable of multiple-actuation (30 and 15 open-close cycles in air and water, correspondingly), shows a fast response (≤500 ms) and has a low energy-consumption per actuation (≤1 J). The valve is inherently latched in both open and close states and is leak-proof to at least 80 kPa. It is actuated (both open and close) by light pulses from an external LED. Many valves (< 100 cm2) can be easily integrated in a single chip with a wax microfluidics technology. Fabrication is based on a low-cost and fast prototyping process compatible with the presence of temperature sensitive biocomponents.

Paper Details

Date Published: 30 May 2017
PDF: 8 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460G (30 May 2017); doi: 10.1117/12.2264919
Show Author Affiliations
M. Díaz-González, Instituto de Microelectrónica de Barcelona (Spain)
G. Boix, Instituto de Microelectrónica de Barcelona (Spain)
C. Fernández-Sánchez, Instituto de Microelectrónica de Barcelona (Spain)
A. Baldi, Instituto de Microelectrónica de Barcelona (Spain)


Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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