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Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever
Author(s): Jiushuai Xu; Maik Bertke; Xiaojing Li; Alaaeldin Gad; Hao Zhou; Hutomo Suryo Wasisto; Erwin Peiner
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Paper Abstract

A ZnO nanorods film covered silicon resonant cantilever sensor is developed for atmosphere humidity detection by monitoring the resonant frequency shifts induced by the additional weight of adsorbed water molecules. Two different crystalline seed-layer deposition methods were applied to grow different nanorods films. The morphology of the ZnO films were characterized and the sensor sensitivities were measured under different relative humidity (RH) levels. The experiments results showed that this novel humidity sensor with ZnO nanorods has a sensitivity of 101.5 ± 12.0 ppm/RH% (amount of adsorbed water of 36.9 ± 4.4 ng/RH%), indicating its potential for portable sensing applications.

Paper Details

Date Published: 13 June 2017
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Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460C (13 June 2017); doi: 10.1117/12.2264897
Show Author Affiliations
Jiushuai Xu, Technische Univ. Braunschweig (Germany)
Lab. for Emerging Nanometrology (Germany)
Maik Bertke, Technische Univ. Braunschweig (Germany)
Lab. for Emerging Nanometrology (Germany)
Xiaojing Li, Technische Univ. Braunschweig (Germany)
Alaaeldin Gad, Technische Univ. Braunschweig (Germany)
Lab. for Emerging Nanometrology (Germany)
National Research Ctr. (Egypt)
Hao Zhou, Technische Univ. Braunschweig (Germany)
Lab. for Emerging Nanometrology (Germany)
Hutomo Suryo Wasisto, Technische Univ. Braunschweig (Germany)
Lab. for Emerging Nanometrology (Germany)
Erwin Peiner, Technische Univ. Braunschweig (Germany)
Lab. for Emerging Nanometrology (Germany)


Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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