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Proceedings Paper

Polarized metrology systems (Conference Presentation)
Author(s): Rongguang Liang

Paper Abstract

Polarization is a unique property of light, providing a number of advantages in optical metrology. In this talk, I will discuss principles and experimental results of polarization techniques in fringe project metrology and interferometric measurement.

Paper Details

Date Published: 6 June 2017
PDF: 1 pages
Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 1022002 (6 June 2017); doi: 10.1117/12.2264881
Show Author Affiliations
Rongguang Liang, College of Optical Sciences, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 10220:
Dimensional Optical Metrology and Inspection for Practical Applications VI
Kevin G. Harding; Song Zhang, Editor(s)

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