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Robust design of an inkjet-printed capacitive sensor for position tracking of a MOEMS-mirror in a Michelson interferometer setup
Author(s): Lisa-Marie Faller; Hubert Zangl
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Paper Abstract

To guarantee high performance of Micro Optical Electro Mechanical Systems (MOEMS), precise position feedback is crucial. To overcome drawbacks of widely used optical feedback, we propose an inkjet-printed capacitive position sensor as smart packaging solution. Printing processes suffer from tolerances in excess of those from standard processes. Thus, FEM simulations covering assumed tolerances of the system are adopted. These simulations are structured following a Design Of Computer Experiments (DOCE) and are then employed to determine a optimal sensor design. Based on the simulation results, statistical models are adopted for the dynamic system. These models are to be used together with specifically designed hardware, considered to cope with challenging requirements of ≈50nm position accuracy at 10MS/s with 1000μm measurement range. Noise analysis is performed considering the influence of uncertainties to assess resolution and bandwidth capabilities.

Paper Details

Date Published: 30 May 2017
PDF: 10 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024611 (30 May 2017); doi: 10.1117/12.2264792
Show Author Affiliations
Lisa-Marie Faller, Institute of Smart System Technologies (Austria)
Hubert Zangl, Institute of Smart System Technologies (Austria)


Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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