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Proceedings Paper

Programmable differential capacitance-to-voltage converter for MEMS accelerometers
Author(s): G. Royo; C. Sánchez-Azqueta; C. Gimeno; C. Aldea; S. Celma
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Paper Abstract

Capacitive MEMS sensors exhibit an excellent noise performance, high sensitivity and low power consumption. They offer a huge range of applications, being the accelerometer one of its main uses. In this work, we present the design of a capacitance-to-voltage converter in CMOS technology to measure the acceleration from the capacitance variations. It is based on a low-power, fully-differential transimpedance amplifier with low input impedance and a very low input noise.

Paper Details

Date Published: 31 May 2017
PDF: 8 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024610 (31 May 2017); doi: 10.1117/12.2264784
Show Author Affiliations
G. Royo, Univ. de Zaragoza (Spain)
C. Sánchez-Azqueta, Univ. de Zaragoza (Spain)
C. Gimeno, Univ. Catholique de Louvain (Belgium)
C. Aldea, Univ. de Zaragoza (Spain)
S. Celma, Univ. de Zaragoza (Spain)


Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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