Share Email Print
cover

Proceedings Paper

Fabrication of 2D and 3D photonic structures using laser lithography
Author(s): P. Gaso; D. Jandura; D. Pudis
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper we demonstrate possibilities of three-dimensional (3D) printing technology based on two photon polymerization. We used three-dimensional dip-in direct-laser-writing (DLW) optical lithography to fabricate 2D and 3D optical structures for optoelectronics and for optical sensing applications. DLW lithography allows us use a non conventional way how to couple light into the waveguide structure. We prepared ring resonator and we investigated its transmission spectral characteristic. We present 3D inverse opal structure from its design to printing and scanning electron microscope (SEM) imaging. Finally, SEM images of some prepared photonic crystal structures were performed.

Paper Details

Date Published: 23 December 2016
PDF: 5 pages
Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 101421F (23 December 2016); doi: 10.1117/12.2264450
Show Author Affiliations
P. Gaso, Univ. of Žilina (Slovakia)
D. Jandura, Univ. of Žilina (Slovakia)
D. Pudis, Univ. of Žilina (Slovakia)


Published in SPIE Proceedings Vol. 10142:
20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Jarmila Müllerová; Dagmar Senderáková; Libor Ladányi; Ľubomír Scholtz, Editor(s)

© SPIE. Terms of Use
Back to Top