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Proceedings Paper

Features of local anodic oxidation process
Author(s): A. Belov; Yu. Chaplygin; S. Lemeshko; I. Sagunova; V. Shevyakov
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Paper Abstract

The article dwells upon theoretical considerations on the nature of probe local anodic oxidation. The concept of the process presented here allows for the device intrinsic amperage limitations in the tip-sample system. The work also demonstrates characteristics of height-modulated dielectric mask formation on the solid-state surfaces.

Paper Details

Date Published: 30 December 2016
PDF: 7 pages
Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241Q (30 December 2016); doi: 10.1117/12.2264436
Show Author Affiliations
A. Belov, National Research Univ. of Electronic Technology (Russian Federation)
Yu. Chaplygin, National Research Univ. of Electronic Technology (Russian Federation)
S. Lemeshko, Nanotechnology Instruments Europe B.V. (Netherlands)
I. Sagunova, National Research Univ. of Electronic Technology (Russian Federation)
V. Shevyakov, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 10224:
International Conference on Micro- and Nano-Electronics 2016
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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