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Proceedings Paper

Preparation of ring resonator based on PDMS using laser lithography
Author(s): D. Jandura; D. Pudis; P. Gaso
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Paper Abstract

In this paper we present preparation process of ring resonator in racetrack configuration based on polydimethylsiloxane (PDMS). 3D laser lithography in combination with imprinting technique was used to pattern photoresist layer as a master for imprinting process. In the next step, PDMS ring resonator was imprinted and filled with core PDMS. Finally, morphological properties of prepared device were investigated by scanning electron microscope (SEM) and confocal microscope and transmission spectrum measurements were performed.

Paper Details

Date Published: 23 December 2016
PDF: 4 pages
Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1014215 (23 December 2016); doi: 10.1117/12.2264360
Show Author Affiliations
D. Jandura, Univ. of Žilina (Slovakia)
D. Pudis, Univ. of Žilina (Slovakia)
P. Gaso, Univ. of Žilina (Slovakia)


Published in SPIE Proceedings Vol. 10142:
20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Jarmila Müllerová; Dagmar Senderáková; Libor Ladányi; Ľubomír Scholtz, Editor(s)

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