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Proceedings Paper

Soft x-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts
Author(s): H. Stiel; J. Braenzel; A. Dehlinger; R. Jung; A. Luebcke; M. Regehly; S. Ritter; J. Tuemmler; M. Schnuerer; C. Seim
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Paper Abstract

In this contribution, we report about nanoscale imaging using a laser produced plasma source based laboratory transmission X-ray microscope (LTXM) in the water window. The highly brilliant soft X-ray radiation of the LTXM is provided by a laser-produced nitrogen plasma source focused by a multilayer condenser mirror to the sample. An objective zone plate maps the magnified image of the sample on the super resolution camera. This camera employs a deep cooled soft-X-ray CCD imaging sensor sandwiched with a xy piezo stage to allow subpixel displacements of the detector. The camera is read out using a very low noise electronics platform, also directing low µm shifts of the sensor between subsequent image acquisitions. Finally an algorithm computes a high resolution image from the individual shifted low-resolution image frames.

Paper Details

Date Published: 17 May 2017
PDF: 10 pages
Proc. SPIE 10243, X-ray Lasers and Coherent X-ray Sources: Development and Applications, 1024309 (17 May 2017); doi: 10.1117/12.2264222
Show Author Affiliations
H. Stiel, Berlin Lab. for Innovative X-ray Technologies (Germany)
Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
J. Braenzel, Berlin Lab. for Innovative X-ray Technologies (Germany)
Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
A. Dehlinger, Berlin Lab. for Innovative X-ray Technologies (Germany)
Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
Technische Univ. Berlin (Germany)
R. Jung, Berlin Lab. for Innovative X-ray Technologies (Germany)
Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
A. Luebcke, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
M. Regehly, greateyes GmbH (Germany)
Brandenburg Univ. of Applied Sciences (Germany)
S. Ritter, greateyes GmbH (Germany)
J. Tuemmler, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
M. Schnuerer, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
C. Seim, Berlin Lab. for Innovative X-ray Technologies (Germany)
Technische Univ. Berlin (Germany)
Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 10243:
X-ray Lasers and Coherent X-ray Sources: Development and Applications
Annie Klisnick; Carmen S. Menoni, Editor(s)

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