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Proceedings Paper

Parameter identification from frequency response of MEMS energy harvesters
Author(s): Binh Duc Truong; Cuong Phu Le; Einar Halvorsen
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Paper Abstract

In this study, we present theoretical analysis and numerical results on a simple technique for extracting unknown model parameters for MEMS electrostatic energy harvesters. We show that the frequency response can be utilized in a least-squares minimization scheme to estimate the damping coefficient, mechanical stiffness and transducer/load parasitic capacitances. The accuracy of the method is tested by application to simulated cases of linear and non-linear harvesters. A single data sweep from such a pseudo-experiment suffices to determine the unknown parameters of the electromechanical model with accuracy. The method is shown to work satisfactorily for both linear and nonlinear devices.

Paper Details

Date Published: 2 June 2017
PDF: 9 pages
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460U (2 June 2017); doi: 10.1117/12.2264094
Show Author Affiliations
Binh Duc Truong, Univ. College of Southeast Norway (Norway)
Cuong Phu Le, Univ. College of Southeast Norway (Norway)
Einar Halvorsen, Univ. College of Southeast Norway (Norway)


Published in SPIE Proceedings Vol. 10246:
Smart Sensors, Actuators, and MEMS VIII
Luis Fonseca; Mika Prunnila; Erwin Peiner, Editor(s)

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