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Proceedings Paper

An optical fiber MEMS pressure sensor using microwave photonics filtering technique
Author(s): Yiping Wang; Ming Wang; Xiaoqi Ni; Wei Xia; Dongmei Guo; Hui Hao; Qingyu Ma; Wei Zhuang
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Paper Abstract

A fiber-optic micro-electromechanical systems (MEMS) extrinsic Fabry-Perot interferometer (EFPI) pressure sensor exploiting microwave photonics filtering technique is firstly proposed and experimentally demonstrated. A single-bandpass microwave photonic filter (MPF) which mainly consists of a spectrum-sliced light source, a pressurized EFPI, a phase modulator (PM) and a length of dispersion compensating fiber (DCF) is demonstrated. The frequency response of the filter with respect to the pressure is studied. By detecting the resonance frequency shifts of the MPF, the pressure can be determined. The theoretical and experimental results show that the proposed EFPI pressure sensor has a higher resolution and higher speed than traditional methods based on optical spectrum analysis. The sensitivity of the sensor is measured to be as high as 86 MHz/MPa in the range of 0-4MPa.

Paper Details

Date Published: 23 April 2017
PDF: 4 pages
Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 1032368 (23 April 2017); doi: 10.1117/12.2263415
Show Author Affiliations
Yiping Wang, Nanjing Normal Univ. (China)
Ming Wang, Nanjing Normal Univ. (China)
Xiaoqi Ni, Nanjing Normal Univ. (China)
Wei Xia, Nanjing Normal Univ. (China)
Dongmei Guo, Nanjing Normal Univ. (China)
Hui Hao, Nanjing Normal Univ. (China)
Qingyu Ma, Nanjing Normal Univ. (China)
Wei Zhuang, Nanjing Normal Univ. (China)


Published in SPIE Proceedings Vol. 10323:
25th International Conference on Optical Fiber Sensors
Youngjoo Chung; Wei Jin; Byoungho Lee; John Canning; Kentaro Nakamura; Libo Yuan, Editor(s)

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