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Proceedings Paper

Measuring optical phase digitally in coherent metrology systems
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Paper Abstract

The accurate measurement of optical phase has many applications in metrology. For biological samples, which appear transparent, the phase data provides information about the refractive index of the sample. In speckle metrology, the phase can be used to estimate stress and strains of a rough surface with high sensitivity. In this theoretical manuscript we compare and contrast the properties of two techniques for estimating the phase distribution of a wave field under the paraxial approximation: (I) A digital holographic system, and (II) An idealized phase retrieval system. Both systems use a CCD or CMOS array to measure the intensities of the wave fields that are reflected from or transmitted through the sample of interest. This introduces a numerical aspect to the problem. For the two systems above we examine how numerical calculations can limit the performance of these systems leading to a near-infinite number of possible solutions.

Paper Details

Date Published: 1 May 2017
PDF: 7 pages
Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 102200B (1 May 2017); doi: 10.1117/12.2262485
Show Author Affiliations
Damien P. Kelly, Univ. College Dublin (Ireland)
James Ryle, Univ. College Dublin (Ireland)
Liang Zhao, Univ. College Dublin (Ireland)
John T. Sheridan, Univ. College Dublin (Ireland)


Published in SPIE Proceedings Vol. 10220:
Dimensional Optical Metrology and Inspection for Practical Applications VI
Kevin G. Harding; Song Zhang, Editor(s)

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