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Proceedings Paper

Ricor's Nanostar water vapor compact cryopump: applications and model overview
Author(s): Rodney S. Harris; Ilan Nachman; Tomer Tauber; Michael Kootzenko; Boris Barak; Eli Aminov; Dan Gover
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Paper Abstract

Ricor Systems has developed a compact, single stage cryopump that fills the gap where GM and other type cryopumps can't fit in. Stirling cycle technology is highly efficient and is the primary cryogenic technology for use in IR, SWIR, HOT FPA, and other IR detector technology in military, security, and aerospace applications. Current GM based dual stage cryopumps have been the legacy type water vapor pumping system for more than 50 years. However, the typically large cryopanel head, compressor footprint, and power requirements make them not cost and use effective for small, tabletop evaporation / sputtering systems, portable analysis systems, and other systems requiring small volume vacuum creation from medium, high, and UHV levels. This single stage cryopump works well in-line with diffusion and molecular turbopumps. Studies have shown effective cooperation with non-evaporable getter technology as well for UHV levels. Further testing in this area are ongoing. Temperatures created by Stirling cycle cryogenic coolers develop a useful temperature range of 40 to 150K. Temperatures of approximately 100 K are sufficient to condense water and all hydrocarbons oil vapors.

Paper Details

Date Published: 5 May 2017
PDF: 18 pages
Proc. SPIE 10180, Tri-Technology Device Refrigeration (TTDR) II, 101800K (5 May 2017); doi: 10.1117/12.2262483
Show Author Affiliations
Rodney S. Harris, RICOR USA, Inc. (United States)
Ilan Nachman, RICOR Cryogenic & Vacuum Systems (Israel)
Tomer Tauber, RICOR Cryogenic & Vacuum Systems (Israel)
Michael Kootzenko, RICOR Cryogenic & Vacuum Systems (Israel)
Boris Barak, RICOR Cryogenic & Vacuum Systems (Israel)
Eli Aminov, RICOR Cryogenic & Vacuum Systems (Israel)
Dan Gover, RICOR Cryogenic & Vacuum Systems (Israel)


Published in SPIE Proceedings Vol. 10180:
Tri-Technology Device Refrigeration (TTDR) II
Richard I. Epstein; Bjørn F. Andresen; Tonny Benschop; Joseph P. Heremans; Sergey V. Riabzev; Mansoor Sheik-Bahae, Editor(s)

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