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Proceedings Paper

Laser microscopy of electronic devices
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Paper Abstract

Laser microscopy offers numerous possibilities for measurement of topographical, electronic, and material properties of microelectronic and optoelectronic devices.

Paper Details

Date Published: 3 November 1995
PDF: 3 pages
Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); doi: 10.1117/12.226223
Show Author Affiliations
Colin J. R. Sheppard, Univ. of Sydney (Australia)


Published in SPIE Proceedings Vol. 2648:
International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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