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Proceedings Paper

Fast white-light interferometry with Hilbert transform evaluation
Author(s): Pavel Pavliček; Erik Mikeska
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Paper Abstract

White-light interferometry is an established method for the measurement of the shape of objects. Unlike to the classical interferometry, white-light interferometry can measure the shape of objects with rough surface. A major disadvantage of white-light interferometry is the low scanning speed and thus the long measurement time. This disadvantage can be overcome by a strong undersampling and Hilbert transform evaluation. We propose a system that measures the shape of objects with rough surface with the scanning speed of more than 100 μm/s with the standard frame rate of 25 fps. The measurement uncertainty is comparable with that obtained with standard design.

Paper Details

Date Published: 23 December 2016
PDF: 7 pages
Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 101420Y (23 December 2016); doi: 10.1117/12.2261951
Show Author Affiliations
Pavel Pavliček, Joint Lab. of Optics of Palacký Univ. and Institute of Physics (Czech Republic)
Erik Mikeska, Joint Lab. of Optics of Palacký Univ. and Institute of Physics (Czech Republic)


Published in SPIE Proceedings Vol. 10142:
20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Jarmila Müllerová; Dagmar Senderáková; Libor Ladányi; Ľubomír Scholtz, Editor(s)

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