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Proceedings Paper

Analytical method for determination of absorbing film optical constants and thickness from reflectance spectra
Author(s): Valery N. Filippov
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Paper Abstract

It is shown that the air-film material reflectance coefficient, and that for the film material- substrate, can be restored from envelopes of the interference pattern in reflectance spectra. Doing so for oblique incidence of light and for two of its polarizations, optical parameters of an absorbing film may be determined without any film dispersion assumptions. Film thickness h is calculated then analytically. Knowing h, the film absorption coefficient can be obtained with high accuracy. Numerical calculations are given to illustrate the method application.

Paper Details

Date Published: 3 November 1995
PDF: 6 pages
Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); doi: 10.1117/12.226187
Show Author Affiliations
Valery N. Filippov, Institute of Physics (Belarus)


Published in SPIE Proceedings Vol. 2648:
International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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