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Proceedings Paper

Complex method for the determination of thin absorptive film parameters
Author(s): A. M. Kostruba; Orest G. Vlokh; R. O. Vlokh
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Paper Abstract

The new method for the determination of the high absorptive thin film parameters is proposed. This technique consists in the complex ellipsometry plus photometry measurements. The comparison of the principal parameters of the proposed technique and the traditional ellipsometry methods is carried out.

Paper Details

Date Published: 3 November 1995
PDF: 6 pages
Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); doi: 10.1117/12.226161
Show Author Affiliations
A. M. Kostruba, Institute of Physical Optics (Ukraine)
Orest G. Vlokh, Institute of Physical Optics (Ukraine)
R. O. Vlokh, Institute of Physical Optics (Ukraine)


Published in SPIE Proceedings Vol. 2648:
International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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