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Proceedings Paper

Optical diagnostics of thermoplastic dielectric and semiconductor material in thin layers
Author(s): Sergey A. Voronov; Oleg Borisovich Katkovskiy; Sergey Alexandrov Neduzhiy; Alexander Vladimirov Solovyov; Yuriy Georgievic Statnikov
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Paper Abstract

The method and installation for defining the dynamic viscosity coefficient, electric resistance coefficient, in thin layers of dielectric and semiconductor materials in stringy state are represented.

Paper Details

Date Published: 3 November 1995
PDF: 6 pages
Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); doi: 10.1117/12.226130
Show Author Affiliations
Sergey A. Voronov, National Technical Univ. of Ukraine (Ukraine)
Oleg Borisovich Katkovskiy, National Technical Univ. of Ukraine (Ukraine)
Sergey Alexandrov Neduzhiy, National Technical Univ. of Ukraine (Ukraine)
Alexander Vladimirov Solovyov, National Technical Univ. of Ukraine (Ukraine)
Yuriy Georgievic Statnikov, National Technical Univ. of Ukraine (Ukraine)


Published in SPIE Proceedings Vol. 2648:
International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergey V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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