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Proceedings Paper

How do high-χ BCP chemical types and process conditions contribute to surface roughness
Author(s): Mary Ann J. Hockey
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Date Published:
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Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 1014621; doi: 10.1117/12.2260897
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Mary Ann J. Hockey, Brewer Science, Inc. (United States)


Published in SPIE Proceedings Vol. 10146:
Advances in Patterning Materials and Processes XXXIV
Christoph K. Hohle, Editor(s)

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