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Proceedings Paper

Method and verification for measuring surface roughness of components by angle resolved scattering method
Author(s): Chunyang Wang; Ruihao Xin; Hongwei Shi; Chengjun Tian; Liang Zhao
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Paper Abstract

This paper introduces the automatic measurement system of laser scattering method based on angular resolution. Discuss the principle of laser in optical element surface scattering, propose the method which use angle resolved scattering (ARS) method to measure surface roughness, at the same time the measurement principle experimental platform is built based on the experimental results after verifying the correctness of the angle resolved scattering method.

Paper Details

Date Published: 28 February 2017
PDF: 8 pages
Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 1025655 (28 February 2017); doi: 10.1117/12.2260713
Show Author Affiliations
Chunyang Wang, Changchun Univ. of Science and Technology (China)
Ruihao Xin, Changchun Univ. of Science and Technology (China)
Hongwei Shi, Changchun Univ. of Science and Technology (China)
Chengjun Tian, Changchun Univ. of Science and Technology (China)
Liang Zhao, Changchun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 10256:
Second International Conference on Photonics and Optical Engineering
Chunmin Zhang; Anand Asundi, Editor(s)

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