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Proceedings Paper

Discussion on method of optical surface roughness measurement
Author(s): Chunyang Wang; Dongmei Lv; Hongwei Shi; Xuelian Liu; Ruihao Xin
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Paper Abstract

In recent years, with the development of modern optics and laser technology, modern industry for optical surface roughness measurement precision of the increasingly high demand, real-time, fast and precise measurement of surface roughness has become constant subject of optical components in processing and test. In this paper, the current method of measuring the surface roughness of optical components were described in detail, including light scattering method, interferometric method, speckle method, and optical stylus method. Besides, the principles and characteristics of different methods were introduced respectively.

Paper Details

Date Published: 28 February 2017
PDF: 6 pages
Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 1025654 (28 February 2017); doi: 10.1117/12.2260711
Show Author Affiliations
Chunyang Wang, Changchun Univ. of Science and Technology (China)
Dongmei Lv, Changchun Univ. of Science and Technology (China)
Hongwei Shi, Changchun Univ. of Science and Technology (China)
Xuelian Liu, Changchun Univ. of Science and Technology (China)
Ruihao Xin, Changchun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 10256:
Second International Conference on Photonics and Optical Engineering
Chunmin Zhang; Anand Asundi, Editor(s)

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