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Proceedings Paper

200-MHz surface acoustic wave mass microbalance
Author(s): William D. Bowers; Raymond L. Chuan
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Paper Abstract

The principle of operation of the surface acoustic wave (SAW) piezoelectric crystals used as microgravimetric sensors in mass microbalances is discussed. Special attention is given to a SAW 200-MHz crystal developed for measuring molecular deposition on spacecrafts, whose operating frequency does not depend on the thickness of the crystal. The frequency stability of the 200 MHz SAW device is better than 5 x 10 exp -9, which corresponds to a lower limit-of-detection of 3 x 10 exp -12 g for a signal-to-noise ratio of 3. A block diagram of the 200 MHz SAW mass microbalance and a schematic diagram of SAW resonator are presented together with performance data of this device.

Paper Details

Date Published: 1 November 1990
PDF: 10 pages
Proc. SPIE 1329, Optical System Contamination: Effects, Measurement, Control II, (1 November 1990); doi: 10.1117/12.22601
Show Author Affiliations
William D. Bowers, Femtometrics (United States)
Raymond L. Chuan, Femtometrics (United States)


Published in SPIE Proceedings Vol. 1329:
Optical System Contamination: Effects, Measurement, Control II
A. Peter M. Glassford, Editor(s)

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