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Proceedings Paper

Analysis of mirror surface after laser or ion removal of contaminants
Author(s): Richard C. Benson; C. Brent Bargeron; Terry E. Phillips; O. Manuel Uy
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Paper Abstract

Mirrors have been examined using various surface analytical techniques following experiments to remove contaminants using either a CO2 laser or an argon ion gun. Optical microscopy, scanning electron microscopy, and noncontact surface profilometry were used to obtain morphological information about the mirror surface. X-ray photoelectron spectroscopy, energy dispersive X-ray analysis, and gas chromatograph/mass spectrometry were used to investigate the composition of the mirror surface.

Paper Details

Date Published: 1 November 1990
PDF: 25 pages
Proc. SPIE 1329, Optical System Contamination: Effects, Measurement, Control II, (1 November 1990); doi: 10.1117/12.22597
Show Author Affiliations
Richard C. Benson, Johns Hopkins Univ. (United States)
C. Brent Bargeron, Johns Hopkins Univ. (United States)
Terry E. Phillips, Johns Hopkins Univ. (United States)
O. Manuel Uy, Johns Hopkins Univ. (United States)


Published in SPIE Proceedings Vol. 1329:
Optical System Contamination: Effects, Measurement, Control II
A. Peter M. Glassford, Editor(s)

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