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Proceedings Paper

Semiconductor nanomembrane-based sensors for high frequency pressure measurements
Author(s): Hang Ruan; Yuhong Kang; Michelle Homer; Richard O. Claus; David Mayo; Ridge Sibold; Tyler Jones; Wing Ng
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Paper Abstract

This paper demonstrates improvements on semiconductor nanomembrane based high frequency pressure sensors that utilize silicon on insulator techniques in combination with nanocomposite materials. The low-modulus, conformal nanomembrane sensor skins with integrated interconnect elements and electronic devices could be applied to vehicles or wind tunnel models for full spectrum pressure analysis. Experimental data demonstrates that: 1) silicon nanomembrane may be used as single pressure sensor transducers and elements in sensor arrays, 2) the arrays may be instrumented to map pressure over the surfaces of test articles over a range of Reynolds numbers, temperature and other environmental conditions, 3) in the high frequency range, the sensor is comparable to the commercial high frequency sensor, and 4) in the low frequency range, the sensor is much better than the commercial sensor. This supports the claim that nanomembrane pressure sensors may be used for wide bandwidth flow analysis.

Paper Details

Date Published: 12 April 2017
PDF: 7 pages
Proc. SPIE 10168, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2017, 101680H (12 April 2017); doi: 10.1117/12.2258708
Show Author Affiliations
Hang Ruan, NanoSonic, Inc. (United States)
Yuhong Kang, NanoSonic, Inc. (United States)
Michelle Homer, NanoSonic, Inc. (United States)
Richard O. Claus, NanoSonic, Inc. (United States)
David Mayo, Virginia Polytechnic Institute and State Univ. (United States)
Ridge Sibold, Virginia Polytechnic Institute and State Univ. (United States)
Tyler Jones, Virginia Polytechnic Institute and State Univ. (United States)
Wing Ng, Virginia Polytechnic Institute and State Univ. (United States)


Published in SPIE Proceedings Vol. 10168:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2017
Jerome P. Lynch, Editor(s)

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