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Proceedings Paper

Fourier modal method for two-dimensional wavefront reconstruction
Author(s): Peiying Liang; Jianping Ding; Jianpei Xia; Yuhua Huang; Hui Cao
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Paper Abstract

This paper introduces a new way of two-dimensional wavefront reconstruction based on the Fourier modal method. Expending the target wavefront by using Fourier series, calculating the expansion coefficient based on the differential phase measured from the experiment, and fitting the coefficients at the missing points by averaging adjacent values, the target wavefront could be reconstructed eventually by using inverse Fourier transform on the expansion coefficients. The paper also introduces our numerical simulation study on the precisions of both the wavefront reconstruction under ideal situation and under the situation with simulated noise respectively. Corresponding verification experiment for the two-dimensional wavefront reconstruction based on the Fourier modal method is also done by using a two-grating lateral shearing interferometry system, with the 3D profile of the sample obtained.

Paper Details

Date Published: 28 February 2017
PDF: 11 pages
Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 1025642 (28 February 2017); doi: 10.1117/12.2257884
Show Author Affiliations
Peiying Liang, Foshan Univ. (China)
Jianping Ding, Nanjing Univ. (China)
Jianpei Xia, Nanjing Univ. (China)
Yuhua Huang, Foshan Univ. (China)
Hui Cao, Foshan Univ. (China)


Published in SPIE Proceedings Vol. 10256:
Second International Conference on Photonics and Optical Engineering
Chunmin Zhang; Anand Asundi, Editor(s)

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