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Proceedings Paper

Fabrication of the asymmetric double-sided concave microlens arrays by femtosecond laser
Author(s): Fan Zhang; Qing Yang; Hao Bian; Feng Chen
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Paper Abstract

In the last decades, fabrication of microlens array in materials with high-damage threshold has attracted increasing interest, especially in the application of high-power laser. In this paper, we propose an advanced strategy to efficiently fabricate microlens array on the surface of glass using a single-pulsed femtosecond laser wet etch process, which is a combination of high-speed laser scanning and the subsequent chemical etch with HF solution. Based on this method, double-sided microlens array, non-regular arrays consisting of close-packed concave microlens array on one side and regular concave MLA on the other side, were fabricated on the 1cm*1cm glass. Especially over one million microlenses could be acquired within an hour, exhibiting great superiority in practical application. Moreover, the optical properties of the asymmetric double-sided MLA were experimentally characterized, and the experimental results reveal the good light homogenization performance.

Paper Details

Date Published: 28 February 2017
PDF: 6 pages
Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102563Q (28 February 2017); doi: 10.1117/12.2257841
Show Author Affiliations
Fan Zhang, Xi'an Jiaotong Univ. (China)
Qing Yang, Xi'an Jiaotong Univ. (China)
Hao Bian, Xi'an Jiaotong Univ. (China)
Feng Chen, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 10256:
Second International Conference on Photonics and Optical Engineering
Chunmin Zhang; Anand Asundi, Editor(s)

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