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Proceedings Paper

Process control using adaptive matrix-form affine projection filtering algorithm
Author(s): Hongoo Lee; Sangjun Han; Heongsoo Kim; Boris Habets; Enrico Bellmann; Steven Tottewitz; Stefan Buhl; Martin Rößiger; Seop Kim
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Paper Abstract

Non-linear overlay deformation is a well-known problem in critical lithography steps. A significant root cause is nonuniform stress, often caused by high temperature processes. Non-uniform stress in the wafer causes vertical deformation of the wafer, which can be measured by topography measurement equipment. In this case study, clustering is done on the topography data to sort each wafer into groups. Using the context information from the clustering, overlay feedback is computed on a wafer level basis. The evaluation of the approach is done with a run-to-run simulation, which allows optimization of this method and evaluation of the on-product overlay performance improvement. In the analysis, different wafer zones are distinguished to characterize the improvement potential for the different zones.

Paper Details

Date Published:
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Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101452N; doi: 10.1117/12.2257802
Show Author Affiliations
Hongoo Lee, SK Hynix, Inc. (Korea, Republic of)
Sangjun Han, SK Hynix, Inc. (Korea, Republic of)
Heongsoo Kim, SK Hynix, Inc. (Korea, Republic of)
Boris Habets, Qoniac GmbH (Germany)
Enrico Bellmann, Qoniac GmbH (Germany)
Steven Tottewitz, Qoniac GmbH (Germany)
Stefan Buhl, Qoniac GmbH (Germany)
Martin Rößiger, Qoniac GmbH (Germany)
Seop Kim, Qoniac Korea Co., Ltd. (Korea, Republic of)


Published in SPIE Proceedings Vol. 10145:
Metrology, Inspection, and Process Control for Microlithography XXXI
Martha I. Sanchez, Editor(s)

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