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Proceedings Paper

Optical and mechanical characterization of spin-on deposited silicon and titanium dioxide films
Author(s): Pengnian Shen; Ming-Jun Li; S. Iraj Najafi; John F. Currie; Richard Leonelli
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Paper Abstract

Spin-on deposited SiO-TiO2 thin films (pure and doped with dyes) are produced. Their optical and mechanical properties are determined and their use for a number of applications is investigated. The spin-on deposited SiOi film has been succesfully doped with coumarin as a colour center and characterized as a waveguide overlay.

Paper Details

Date Published: 1 November 1990
PDF: 4 pages
Proc. SPIE 1328, Sol-Gel Optics, (1 November 1990); doi: 10.1117/12.22572
Show Author Affiliations
Pengnian Shen, Ecole Polytechnique (Canada)
Ming-Jun Li, Ecole Polytechnique (Canada)
S. Iraj Najafi, Ecole Polytechnique (Canada)
John F. Currie, Ecole Polytechnique (Canada)
Richard Leonelli, Univ. of Montreal (Canada)

Published in SPIE Proceedings Vol. 1328:
Sol-Gel Optics
John D. Mackenzie; Donald R. Ulrich, Editor(s)

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