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Proceedings Paper

Fabrication of GaAs quantum nanodisk and its optical response by bio-template, neutral beam etching and asymmetric AlGaAs barrier regrowth
Author(s): Akio Higo; Yafeng Chen; Takayuki Kiba; Cedric Thomas; Junichi Takayama; Akira Imoto; Soushi Miyazaki; Takeshi Kamikawa; Masahiro Tanaka; Ichiro Yamashita; Yunpeng Wang; Hassanet Sodabanlu; Masakazu Sugiyama; Yoshiaki Nakano; Akihiro Murayama; Seiji Samukawa
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Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160O; doi: 10.1117/12.2256651
Show Author Affiliations
Akio Higo, Tohoku Univ. (Japan)
Yafeng Chen, Hokkaido Univ. (Japan)
Takayuki Kiba, Kitami Institute of Technology (Japan)
Cedric Thomas, Institute of Fluid Science, Tohoku Univ. (Japan)
Junichi Takayama, Hokkaido Univ. (Japan)
Akira Imoto, KYOCERA Corp. (Japan)
Soushi Miyazaki, KYOCERA Corp. (Japan)
Takeshi Kamikawa, KYOCERA Corp. (Japan)
Masahiro Tanaka, KYOCERA Corp. (Japan)
Ichiro Yamashita, Nara Institute of Science and Technology (Japan)
Yunpeng Wang, The Univ. of Tokyo (Japan)
Hassanet Sodabanlu, The Univ. of Tokyo (Japan)
Masakazu Sugiyama, The Univ. of Tokyo (Japan)
Yoshiaki Nakano, The Univ. of Tokyo (Japan)
Akihiro Murayama, Hokkaido Univ. (Japan)
Seiji Samukawa, Institute of Fluid Science, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 10116:
MOEMS and Miniaturized Systems XVI
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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