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Proceedings Paper

Zeeko precession for free-form polishing
Author(s): F. Procháska; I. Poláková; J. Polák; O. Matoušek; D. Tomka
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Paper Abstract

The aim of this work is an exploration of the options for optical surface polishing using the Zeeko IRP 100 machine and raster kinematics suitable for free-form polishing. For this purpose, aspheric surfaces were polished in raster prepolishing mode and then in Precession raster 3D shape correction, which is based on the Dwell time tool movement control. It was found that shape accuracy can achieve the value of approximately 35 nm RMS. The main inaccuracy was caused by the mid-spatial frequencies generated by the kinematics of the applied tools, which also limited the achievable values of microroughness.

Paper Details

Date Published: 11 November 2016
PDF: 7 pages
Proc. SPIE 10151, Optics and Measurement International Conference 2016, 101510O (11 November 2016); doi: 10.1117/12.2256558
Show Author Affiliations
F. Procháska, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
I. Poláková, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
J. Polák, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
O. Matoušek, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
D. Tomka, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 10151:
Optics and Measurement International Conference 2016
Jana Kovacicinova, Editor(s)

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