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Proceedings Paper

Multi-wavelength VCSEL arrays using high-contrast gratings
Author(s): Erik Haglund; Johan S. Gustavsson; Wayne V. Sorin; Jörgen Bengtsson; David Fattal; Åsa Haglund; Michael Tan; Anders Larsson
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Paper Abstract

The use of a high-contrast grating (HCG) as the top mirror in a vertical-cavity surface-emitting laser (VCSEL) allows for setting the resonance wavelength by the grating parameters in a post-epitaxial growth fabrication process. Using this technique, we demonstrate electrically driven multi-wavelength VCSEL arrays at ~980 nm wavelength. The VCSELs are GaAs-based and the suspended GaAs HCGs were fabricated using electron-beam lithography, dry etching and selective removal of an InGaP sacrificial layer. The air-coupled cavity design enabled 4-channel arrays with 5 nm wavelength spacing and sub-mA threshold currents thanks to the high HCG reflectance.

Paper Details

Date Published: 20 February 2017
PDF: 7 pages
Proc. SPIE 10113, High Contrast Metastructures VI, 101130B (20 February 2017); doi: 10.1117/12.2256348
Show Author Affiliations
Erik Haglund, Chalmers Univ. of Technology (Sweden)
Johan S. Gustavsson, Chalmers Univ. of Technology (Sweden)
Wayne V. Sorin, Hewlett-Packard Enterprise (United States)
Jörgen Bengtsson, Chalmers Univ. of Technology (Sweden)
David Fattal, LEIA Inc. (United States)
Åsa Haglund, Chalmers Univ. of Technology (Sweden)
Michael Tan, Hewlett-Packard Enterprise (United States)
Anders Larsson, Chalmers Univ. of Technology (Sweden)


Published in SPIE Proceedings Vol. 10113:
High Contrast Metastructures VI
Connie J. Chang-Hasnain; Andrei Faraon; Fumio Koyama; Weimin Zhou, Editor(s)

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