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Proceedings Paper

QCL seeded, ns-pulse, multi-line, CO2 laser oscillator for laser-produced-plasma extreme-UV source
Author(s): Krzysztof Michał Nowak; Takashi Suganuma; Yoshiaki Kurosawa; Takeshi Ohta; Yasufumi Kawasuji; Hiroaki Nakarai; Takashi Saitou; Junichi Fujimoto; Hakaru Mizoguchi; Akira Sumitani; Akira Endo
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Paper Abstract

Successful merger of state-of-the-art, semiconductor quantum-cascade lasers (QCL), with the mature CO2 laser technology, resulted in a delivery of highly-desired qualities of CO2 laser output that were not available previously without much effort. These qualities, such as multi-line operation, excellent spectro-temporal stability and pulse waveform control, became available from a single device of moderate complexity. This paper describes the operation principle and the unique properties of the solid{state seeded CO2 laser, invented for an application in laser-produced-plasma (LPP), extreme-UV (EUV) light source.

Paper Details

Date Published: 13 January 2017
PDF: 6 pages
Proc. SPIE 10254, XXI International Symposium on High Power Laser Systems and Applications 2016, 102540W (13 January 2017); doi: 10.1117/12.2256003
Show Author Affiliations
Krzysztof Michał Nowak, Gigaphoton Inc. (Japan)
Takashi Suganuma, Gigaphoton Inc. (Japan)
Yoshiaki Kurosawa, Gigaphoton Inc. (Japan)
Takeshi Ohta, Gigaphoton Inc. (Japan)
Yasufumi Kawasuji, Gigaphoton Inc. (Japan)
Hiroaki Nakarai, Gigaphoton Inc. (Japan)
Takashi Saitou, Gigaphoton Inc. (Japan)
Junichi Fujimoto, Gigaphoton Inc. (Japan)
Hakaru Mizoguchi, Gigaphoton Inc. (Japan)
Akira Sumitani, Gigaphoton Inc. (Japan)
Akira Endo, Waseda Univ. (Japan)

Published in SPIE Proceedings Vol. 10254:
XXI International Symposium on High Power Laser Systems and Applications 2016
Dieter Schuoecker; Richard Majer; Julia Brunnbauer, Editor(s)

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