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Proceedings Paper

Observation of fs-laser spallative ablation using soft X-ray laser probe
Author(s): Masaharu Nishikino; Noboru Hasegawa; Takuro Tomita; Yasuo Minami; Takashi Eyama; Naoya Kakimoto; Rui Izutsu; Motoyoshi Baba; Tetsuya Kawachi; Tohru Suemoto
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Paper Abstract

The initial stages of femtosecond laser ablation of gold were observed by single-shot soft X-ray laser interferometer and reflectometer. The ablation front surface and the spallation shell dome structure were observed from the results of the soft X-ray interferogram, reflective image, and shadowgraph. The formation and evolution of soft X-ray Newton’s rings (NRs) were found by reflective imaging at the early stages of the ablation dynamics. The soft X-ray NRs are caused by the interference between the bulk ablated surface and nanometer-scale thin spallation layer. The spallation layer was kept at the late timing of the ablation dynamics, and the height of that reached over 100 μm. The temporal evolution of the bulk ablated surface was observed in the ablation dynamics. From these results, we have succeeded in obtaining the temporal evolution of the ablation front exfoliated from the gold surface.

Paper Details

Date Published: 14 March 2017
PDF: 5 pages
Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 100910O (14 March 2017); doi: 10.1117/12.2255725
Show Author Affiliations
Masaharu Nishikino, National Institutes for Quantum and Radiological Science and Technology (Japan)
Noboru Hasegawa, Tokushima Univ. (Japan)
Takuro Tomita, Tokushima Univ. (Japan)
Yasuo Minami, The Univ. of Tokyo (Japan)
Takashi Eyama, Tokushima Univ. (Japan)
Naoya Kakimoto, Tokushima Univ. (Japan)
Rui Izutsu, Tokushima Univ. (Japan)
Motoyoshi Baba, The Univ. of Tokyo (Japan)
Tetsuya Kawachi, National Institutes for Quantum and Radiological Science and Technology (Japan)
Tohru Suemoto, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 10091:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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