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Proceedings Paper

Piezoelectric micromachined ultrasonic transducers and micropumps: from design to optomicrofluidic applications
Author(s): Shadi Khazaaleh; Numan Saeed; Inas Taha; Mateusz T. Madzik; Jaime Viegas
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Paper Abstract

In this work, we present the experimental results of a new wafer-level production platform for aluminum nitride based piezoelectric micromachined ultrasonic transducers (PMUTs), operated by lower than 10 V peak-to-peak signals, and covering ultrasonic frequency ranges from 200 kHz up to 10 MHz, with measured axial displacements ranging from a few nanometers up to 600 nm. The fabricated devices have a low footprint of (130x130) μm2. The experimental results are in excellent agreement with finite-element method simulations. The small footprint and driving voltages of these piezo-microactuators are well suited for the development of micropump and micromixer designs for portable microfluidics applications.

Paper Details

Date Published: 27 March 2017
PDF: 7 pages
Proc. SPIE 10061, Microfluidics, BioMEMS, and Medical Microsystems XV, 100610S (27 March 2017); doi: 10.1117/12.2254733
Show Author Affiliations
Shadi Khazaaleh, Masdar Institute of Science & Technology (United Arab Emirates)
Numan Saeed, Masdar Institute of Science & Technology (United Arab Emirates)
Inas Taha, Masdar Institute of Science & Technology (United Arab Emirates)
Mateusz T. Madzik, Masdar Institute of Science & Technology (United Arab Emirates)
Jaime Viegas, Masdar Institute of Science & Technology (United Arab Emirates)


Published in SPIE Proceedings Vol. 10061:
Microfluidics, BioMEMS, and Medical Microsystems XV
Bonnie L. Gray; Holger Becker, Editor(s)

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