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Proceedings Paper

Pregrooving on glass disks by the sol-gel method: effects of the addition of organic polymers on the formation of glass films in the SiO2-TiO2 system
Author(s): Atsunori Matsuda; Yoshihiro Matsuno; Shigeyuki Kataoka; Shinya Katayama; Toshio Tsuno; Noboru Tohge; Tsutomu Minami
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Paper Abstract

The effects of the addition of polyethylene glycol(PEG) on the formation of gel-derived glass films in the Si02-TiO2 system were studied, aimed at their application to the optical memory disks. The viscosity of the as-prepared sols increased almost linearly with increasing PEG content. The increase in viscosity of the sols during the storage was retarded with decreasing molecular weight of PEG added and with increasing amount of PEG added. The viscosity increase of the sols during the storage, however, showed a similar temperature dependence, i.e. almost the same apparent activation energy was obtained, in the sols containing different amounts of PEG. These findings indicate that PEG added to the SiO2-TiO2 sols scarcely reacts with the hydrolyzed inorganic species. The hardness of the resultant PEG-containing gel films greatly decreased with increasing PEG content. The gel films containing PEG of the smaller average molecular weight showed the higher hardness and the steeper increase in hardness with increasing the heat-treatment temperature than those containing PEG of the larger average molecular weight. For a high performance in the fine patterning process and densification of the resultant patterned films, PEG of the smaller amount and the smaller molecular weight is favorable, provided the PEG-containing gel films are initially soft enough to emboss fine patterns by pressing a stamper. Incorporated PEG in the Si02-Ti02 gel films decomposed completely at temperatures over 300 °C and had a very slight influence on chemical bondings in the resultant films.

Paper Details

Date Published: 1 November 1990
PDF: 9 pages
Proc. SPIE 1328, Sol-Gel Optics, (1 November 1990); doi: 10.1117/12.22547
Show Author Affiliations
Atsunori Matsuda, Nippon Sheet Glass Co., Ltd. (Japan)
Yoshihiro Matsuno, Nippon Sheet Glass Co., Ltd. (Japan)
Shigeyuki Kataoka, Nippon Sheet Glass Co., Ltd. (Japan)
Shinya Katayama, Nippon Sheet Glass Co., Ltd. (Japan)
Toshio Tsuno, Nippon Sheet Glass Co., Ltd. (Japan)
Noboru Tohge, Univ. of Osaka Prefecture (Japan)
Tsutomu Minami, Univ. of Osaka Prefecture (Japan)

Published in SPIE Proceedings Vol. 1328:
Sol-Gel Optics
John D. Mackenzie; Donald R. Ulrich, Editor(s)

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