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Proceedings Paper

Integrated lab-on-a-chip sensor using shallow silicon waveguide multimode interference (MMI) device
Author(s): Mohamed Y. Elsayed; Aya O. Zaki; Yehea Ismail; Mohamed A. Swillam
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Paper Abstract

The objective of this work was to develop an integrated general purpose label-free optical sensor using standard photolithography on silicon-on-insulator platform for lab on chip applications. Shallow silicon waveguides have weak confinement in the silicon with lots of field in the cladding. This is advantageous in sensor applications due to the high light matter interaction. Here, we use our shallow strip waveguide platform to design a sensor employing a multimode interference (MMI) section. Utilizing a multi-mode section as short as 4 mm, the sensor exhibits sensitivity ranging from 417 nm / RIU to 427 nm / RIU with a figure of merit from 32 to 133.

Paper Details

Date Published: 16 February 2017
PDF: 6 pages
Proc. SPIE 10106, Integrated Optics: Devices, Materials, and Technologies XXI, 101060X (16 February 2017); doi: 10.1117/12.2254414
Show Author Affiliations
Mohamed Y. Elsayed, Zewail City of Science and Technology (Egypt)
The American Univ. in Cairo (Egypt)
Aya O. Zaki, The American Univ. in Cairo (Egypt)
Ain Shams Univ. (Egypt)
Yehea Ismail, Zewail City of Science and Technology (Egypt)
The American Univ. in Cairo (Egypt)
Mohamed A. Swillam, The American Univ. in Cairo (Egypt)


Published in SPIE Proceedings Vol. 10106:
Integrated Optics: Devices, Materials, and Technologies XXI
Sonia M. García-Blanco; Gualtiero Nunzi Conti, Editor(s)

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