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Proceedings Paper

Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing
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Paper Abstract

We demonstrated beam shaping to top-flat and square by phase-only Spatial Light Modulator (SLM) and spatial frequency filtering. Spatial phase distribution of a femtosecond laser beam was modulated by a phase grating pattern reflecting a transfer function for beam shaping. By filtering the higher spatial frequency component at Fourier plane in 4f system, the spatial amplitude distribution of the zero-order beam was shaped to top-flat and square. This result enables us to fabricate large area and uniform devices by using multi-shot processing.

Paper Details

Date Published: 27 February 2017
PDF: 8 pages
Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 100911C (27 February 2017); doi: 10.1117/12.2253983
Show Author Affiliations
Kazuhito Osawa, Osaka Univ. (Japan)
Masataka Yoshida, Osaka Univ. (Japan)
Yoshiki Nakata, Osaka Univ. (Japan)
Noriaki Miyanaga, Osaka Univ. (Japan)
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
Tatsuya Shoji, Osaka City Univ. (Japan)
Yasuyuki Tsuboi, Osaka City Univ. (Japan)


Published in SPIE Proceedings Vol. 10091:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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