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Proceedings Paper

SOI-based centimeter-scale Mach-Zehnder interferometers for fluid sensing
Author(s): Ayat M. Taha; Bruna Paredes; Anatol Khilo; Marcus S. Dahlem
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Paper Abstract

In this work, we demonstrate centimeter-long Mach-Zehnder interferometers (MZIs) suitable for optical uid sensing applications, fabricated on a silicon-on-insulator platform through photolithography. The sensing mech- anism is based on the perturbation of the evanescent field of the optical mode in the sensing arm of the MZI by the measurand. We explore two different configurations for the MZI sensing arm, a partially exposed and a fully suspended, both defined as ridge waveguides with a 450 nm-wide and a 220 nm-thick ridge on a 90 nm-thick silicon slab. The partially exposed MZI arm has oxide under-cladding and air over-cladding, while the fully suspended version has its buried oxide locally removed through an isotropic etch. The MZIs are slightly unbalanced, with arm lengths around 1 cm. The sensitivity of the devices is evaluated through mode solver simulations, with values around 240 nm/RIU and 740 nm/RIU, for the partially exposed and fully suspended structures, respectively.

Paper Details

Date Published: 22 February 2017
PDF: 5 pages
Proc. SPIE 10106, Integrated Optics: Devices, Materials, and Technologies XXI, 101060N (22 February 2017); doi: 10.1117/12.2253609
Show Author Affiliations
Ayat M. Taha, Masdar Institute of Science & Technology (United Arab Emirates)
Bruna Paredes, Masdar Institute of Science & Technology (United Arab Emirates)
Anatol Khilo, Masdar Institute of Science & Technology (United Arab Emirates)
Marcus S. Dahlem, Masdar Institute of Science & Technology (United Arab Emirates)


Published in SPIE Proceedings Vol. 10106:
Integrated Optics: Devices, Materials, and Technologies XXI
Sonia M. García-Blanco; Gualtiero Nunzi Conti, Editor(s)

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