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Proceedings Paper

Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerization
Author(s): Sönke Steenhusen; Sebastian Hasselmann; Gerhard Domann
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Paper Abstract

Two-Photon Polymerization (2PP) has attracted broad interest for the fabrication of microoptical elements due to its design flexibility and precision. Along with tailored hybrid polymers a higher level of functional integration and new application concepts are enabled. As the entire volume of the desired 3D structure is filled in a point-by-point fashion, the fabrication can require several days inhibiting the adoption of 2PP as an additive manufacturing process at industrial level. We review different strategies to overcome the limitation in throughput and their impact on the patterning result. Particularly, processing using galvoscanner technology and replication of 2PP structures are highlighted.

Paper Details

Date Published: 20 February 2017
PDF: 9 pages
Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 101150S (20 February 2017); doi: 10.1117/12.2252913
Show Author Affiliations
Sönke Steenhusen, Fraunhofer ISC (Germany)
Sebastian Hasselmann, Fraunhofer ISC (Germany)
Gerhard Domann, Fraunhofer ISC (Germany)


Published in SPIE Proceedings Vol. 10115:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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