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Proceedings Paper

Monolithic integration of hybrid III-V/Si lasers and Si-based modulators for data transmission up to 25Gbps
Author(s): Thomas Ferrotti; Benjamin Blampey; Christophe Jany; Hélène Duprez; Alain Chantre; Frédéric Boeuf; Christian Seassal; Badhise Ben Bakir
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Paper Abstract

In this paper, the 200mm silicon-on-insulator (SOI) platform is used to demonstrate the monolithic co-integration of hybrid III-V/silicon Distributed Bragg Reflector (DBR) tunable lasers and silicon Mach-Zehnder modulator (MZMs), to achieve fully integrated hybrid transmitters for silicon photonics. The design of each active component, as well as the fabrication process steps of the whole architecture are described in details. Data transmission rate up to 25Gb/s has been reached for transmitters using MZMs with active lengths of 2mm and 4mm. Extinction ratios of respectively 2.9dB and 4.7dB are obtained by applying drive voltages of 2.5V peak-to-peak on the MZMs. 25Gb/s data transmission is demonstrated at 1303.5nm and 1315.8nm, with the possibility to tune the operating wavelength by up to 8.5nm in each case, by using metallic heaters above the lasers Bragg reflectors.

Paper Details

Date Published: 16 February 2017
PDF: 21 pages
Proc. SPIE 10106, Integrated Optics: Devices, Materials, and Technologies XXI, 101060J (16 February 2017); doi: 10.1117/12.2252760
Show Author Affiliations
Thomas Ferrotti, Univ. Grenoble Alpes, CEA-LETI, CEA-Grenoble (France)
STMicroelectronics (France)
Univ. de Lyon, Ecole Centrale de Lyon, CNRS, Institut des Nanotechnologies de Lyon-INL (France)
Benjamin Blampey, Univ. Grenoble Alpes, CEA-LETI, CEA-Grenoble (France)
Christophe Jany, Univ. Grenoble Alpes, CEA-LETI, CEA-Grenoble (France)
Hélène Duprez, Univ. Grenoble Alpes, CEA-LETI, CEA-Grenoble (France)
Univ. de Lyon, Ecole Centrale de Lyon, CNRS, Institut des Nanotechnologies de Lyon-INL (France)
Alain Chantre, STMicroelectronics (France)
Frédéric Boeuf, STMicroelectronics (France)
Christian Seassal, Univ. de Lyon, Ecole Centrale de Lyon, CNRS, Institut des Nanotechnologies de Lyon-INL (France)
Badhise Ben Bakir, Univ. Grenoble Alpes, CEA-LETI, CEA-Grenoble (France)


Published in SPIE Proceedings Vol. 10106:
Integrated Optics: Devices, Materials, and Technologies XXI
Sonia M. García-Blanco; Gualtiero Nunzi Conti, Editor(s)

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