Share Email Print
cover

Proceedings Paper

Control of spectral transmission enhancement properties of random anti-reflecting surface structures fabricated using gold masking
Author(s): Abigail Peltier; Gopal Sapkota; Matthew Potter; Lynda E. Busse; Jesse A. Frantz; L. Brandon Shaw; Jasbinder S. Sanghera; Ishwar D. Aggarwal; Menelaos K. Poutous
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Random anti-reflecting subwavelength surface structures (rARSS) have been shown to suppress Fresnel reflection and scatter from optical surfaces. The structures effectively function as a gradient-refractive-index at the substrate boundary, and the spectral transmission properties of the boundary have been shown to depend on the structure’s statistical properties (diameter, height, and density.) We fabricated rARSS on fused silica substrates using gold masking. A thin layer of gold was deposited on the surface of the substrate and then subjected to a rapid thermal annealing (RTA) process at various temperatures. This RTA process resulted in the formation of gold “islands” on the surface of the substrate, which then acted as a mask while the substrate was dry etched in a reactive ion etching (RIE) process. The plasma etch yielded a fused silica surface covered with randomly arranged “rods” that act as the anti-reflective layer. We present data relating the physical characteristics of the gold “island” statistical populations, and the resulting rARSS “rod” population, as well as, optical scattering losses and spectral transmission properties of the final surfaces. We focus on comparing results between samples processed at different RTA temperatures, as well as samples fabricated without undergoing RTA, to relate fabrication process statistics to transmission enhancement values.

Paper Details

Date Published: 20 February 2017
PDF: 7 pages
Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 101150B (20 February 2017); doi: 10.1117/12.2252382
Show Author Affiliations
Abigail Peltier, The Univ. of North Carolina at Charlotte (United States)
Gopal Sapkota, The Univ. of North Carolina at Charlotte (United States)
Matthew Potter, The Univ. of North Carolina at Charlotte (United States)
Lynda E. Busse, U.S. Naval Research Lab. (United States)
Jesse A. Frantz, U.S. Naval Research Lab. (United States)
L. Brandon Shaw, U.S. Naval Research Lab. (United States)
Jasbinder S. Sanghera, U.S. Naval Research Lab. (United States)
Ishwar D. Aggarwal, Sotera Defense Solutions, Inc. (United States)
Menelaos K. Poutous, The Univ. of North Carolina at Charlotte (United States)


Published in SPIE Proceedings Vol. 10115:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

© SPIE. Terms of Use
Back to Top